Modes of Hydrogen Incorporation in Hydrogenated Amorphous Carbon (a–C:H), Modifications with Annealing Temperature - Archive du Journal de Physique Accéder directement au contenu
Article Dans Une Revue Journal de Physique III Année : 1997

Modes of Hydrogen Incorporation in Hydrogenated Amorphous Carbon (a–C:H), Modifications with Annealing Temperature

Y. Bounouh
  • Fonction : Auteur
K. Zellama
  • Fonction : Auteur
Andreas Zeinert
M. Benlahsen
M. Clin
  • Fonction : Auteur
  • PersonId : 1154653
  • IdRef : 132284375
M. Thèye
  • Fonction : Auteur

Résumé

In order to obtain more information about the nature of the hydrogen bonding and the thermal stability of a-C:H films, we have studied two different types of films labeled I and II deposited in a d.c. multipolar plasma system from pure methane at substrate bias equal to -40 and -600 V respectively. A combination of several complementary techniques has been carried out on the samples in their as-deposited state as well as after isochronal annealing cycles at increasing temperatures up to 650 ○C. The results clearly indicate that the two types of samples have very different H bonding and microstructure in their as-deposited state. They also behave differently upon annealing and still exhibit quite different microstructures and H bonding configurations up to high annealing temperature.

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jpa-00249707 , version 1 (04-02-2008)

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Y. Bounouh, K. Zellama, Andreas Zeinert, M. Benlahsen, M. Clin, et al.. Modes of Hydrogen Incorporation in Hydrogenated Amorphous Carbon (a–C:H), Modifications with Annealing Temperature. Journal de Physique III, 1997, 7 (11), pp.2159-2164. ⟨10.1051/jp3:1997248⟩. ⟨jpa-00249707⟩

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